Design and Analysis of a Novel MEMS Dual Axis Accelerometer
نویسندگان
چکیده
Due to their small size, low weight, low cost and low energy consumption, MEMS (Microelectromechanical Systems) devices have achieved great commercial success in recent decades. MEMS accelerometers have been widely used in automobile airbag deployment systems, inertial navigations, etc. In this paper, the design and simulation of a novel bulk-micromachined capacitive MEMS dual axis accelerometer based on Silicon-on-Glass (SoG) structure is proposed. Theoretical model is used to analyze the working principle of the accelerometer. Based on analysis, a set of optimized design parameters are suggested. ANSYS simulation is used to verify the function of the device. The device has Silicon-on-Glass compound structure based on silicon-glass anodic bonding, which can reduce parasitic capacitance and ease the signal detection. DRIE is used to pattern the silicon device structure. The fabrication flow of the MEMS accelerometer is also suggested. The proposed accelerometer can be used for 2-axis inertial navigation applications.
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